each their Using a computer dose mapper compensate Miscellaneous goods handcuffs
Dose Mapper - Advanced System for Correction of Critical Dimension (CD) Variations in Deep Sub Micron Technologies
Dose Mapper - Advanced System for Correction of Critical Dimension (CD) Variations in Deep Sub Micron Technologies
Schematic of decomposition of CD errors based on Dose Mapper. | Download Scientific Diagram
Application of Dosemapper for 65-nm gate CD control: strategies and results - [scite report]
Schematic of the Dose Mapper concept is shown. | Download Scientific Diagram
Double patterning CDU of 3σ=4.9nm before DoseMapper correction (Left)... | Download Scientific Diagram
Dose Map and Placement Co-Optimization for Timing Yield Enhancement and Leakage Power Reduction Kwangok Jeong, Andrew B. Kahng, Chul-Hong Park, Hailong. - ppt download